A. A. Voevodin and M. S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review, Surface and Coatings Technology, vol.82, issue.3, pp.199-213, 1996.
DOI : 10.1016/0257-8972(95)02734-3

F. Qian, V. Craciun, R. K. Singh, S. D. Dutta, and P. P. Pronko, High intensity femtosecond laser deposition of diamond-like carbon thin films, Journal of Applied Physics, vol.86, issue.4, pp.2281-2290, 1999.
DOI : 10.1063/1.371043

B. Rethfeld, K. Sokolowski-tinten, D. Der-linde, and S. I. Anisimov, Timescales in the response of materials to femtosecond laser excitation, Applied Physics A, vol.81, issue.4-6, p.767, 2004.
DOI : 10.1103/PhysRevLett.81.224

M. Okoshi, S. Higuchi, and M. Hanabusa, Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films, Journal of Applied Physics, vol.86, issue.3, p.1768, 1999.
DOI : 10.1063/1.370962

S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello et al., Generation of silicon nanoparticles via femtosecond laser ablation in vacuum, Applied Physics Letters, vol.84, issue.22, p.4502, 2004.
DOI : 10.1063/1.1757014

O. Albert, S. Roger, Y. Glinec, J. C. Loulergue, J. Etchepare et al., Time-resolved spectroscopy measurements of a titanium plasma induced by nanosecond and femtosecond lasers, Applied Physics A: Materials Science & Processing, vol.76, issue.3, p.319, 2003.
DOI : 10.1007/s00339-002-1815-8
URL : https://hal.archives-ouvertes.fr/hal-00018737

N. Benchikh, F. Garrelie, C. Donnet, B. Bouchet-fabre, K. Wolski et al., Nickel-incorporated amorphous carbon film deposited by femtosecond pulsed laser ablation, Thin Solid Films, vol.482, issue.1-2, pp.287-292, 2005.
DOI : 10.1016/j.tsf.2004.11.162
URL : https://hal.archives-ouvertes.fr/hal-00659004

N. Benchikh, F. Garrelie, K. Wolski, C. Donnet, R. Y. Fillit et al., Nanocomposite tantalum???carbon-based films deposited by femtosecond pulsed laser ablation, Thin Solid Films, vol.494, issue.1-2, pp.98-104, 2006.
DOI : 10.1016/j.tsf.2005.07.161
URL : https://hal.archives-ouvertes.fr/hal-00292849

Y. Y. Tsui and D. G. Redman, A laser ablation technique for improving the adhesion of laser-deposited diamond-like carbon coatings to metal substrates, Surface and Coatings Technology, vol.126, issue.2-3, p.96, 2000.
DOI : 10.1016/S0257-8972(99)00642-8

D. Grojo, J. Hermann, and A. Perrone, Plasma analyses during femtosecond laser ablation of Ti, Zr, and Hf, Journal of Applied Physics, vol.97, issue.6, p.63306, 2005.
DOI : 10.1063/1.1861519
URL : https://hal.archives-ouvertes.fr/hal-00123681

R. Amoruso, M. Bruzzese, N. N. Vitiello, P. A. Nedialkov, and . Atanasov, Experimental and theoretical investigations of femtosecond laser ablation of aluminum in vacuum, Journal of Applied Physics, vol.98, issue.4, p.44907, 2005.
DOI : 10.1063/1.2032616

J. Perriere, E. Millon, W. Seiler, C. Boulmer-leborgne, V. Craciun et al., Comparison between ZnO films grown by femtosecond and nanosecond laser ablation, Journal of Applied Physics, vol.91, issue.2, p.690, 2002.
DOI : 10.1063/1.1426250

A. Miotello and R. Kelly, Applied Physics A, Materials Science and Processing, vol.69, issue.67, 1999.

C. D. Wagner, W. M. Riggs, L. E. Davis, and J. F. Moulder, Handbook of X-ray Photoelectron Spectroscopy, Perking Elmer Corporation

O. Y. Khyzhun, XPS, XES, and XAS studies of the electronic structure of substoichiometric cubic TaCx and hexagonal Ta2Cy carbides, Journal of Alloys and Compounds, vol.259, issue.1-2, p.47, 1997.
DOI : 10.1016/S0925-8388(97)00098-4

A. R. Striganov and N. S. Sventitskii, Tables of spectral lines of neutral and ionized atoms, IFI/Plenum, 1968.

J. F. Ziegler, J. P. Biersack, and U. Littmark, The stopping and Range of ion in Solids, 1985.