Programmable femtosecond beam shaping applied to micromachining

Nicolas Sanner (1) , Nicolas Huot (1) , Eric Audouard (1) , Christian Larat (2) , Jérôme Bourderionnet (2) , Arnaud Brignon (2) , Pierre Laporte (1) , Jean-Pierre Huignard (2)

1 LHC - Laboratoire Hubert Curien
2 Thales Research and Technology [Palaiseau]

We propose an active and adaptative optics device dedicated to programmable femtosecond beam shaping, based on the use of an optically addressed light valve. A theoretical investigation of the system is presented. The experimental set-up incorporating an active beam shaping device, is depicted. Results are then described and discussed.

Mots clés: Keywords : active and adaptive optics; femtosecond laser; micromachining

Domaines: Optique [physics.optics]

Nicolas Sanner, Nicolas Huot, Eric Audouard, Christian Larat, Jérôme Bourderionnet, et al.. Programmable femtosecond beam shaping applied to micromachining. Proceedings SPIE, 2004, 5249, pp.483-489. ⟨ujm-00118350⟩