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New methods to control quality and precision of micro-machining with femtosecond lasers

Eric Audouard 1 Ronan Le Harzic 1 Nicolas Sanner 1 Nicolas Huot 1 C. Donnet 1 Pierre Laporte 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
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https://hal-ujm.archives-ouvertes.fr/ujm-00118364
Contributor : Nicolas Huot Connect in order to contact the contributor
Submitted on : Tuesday, December 5, 2006 - 10:14:42 AM
Last modification on : Sunday, February 9, 2020 - 10:08:03 PM

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  • HAL Id : ujm-00118364, version 1

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UNIV-ST-ETIENNE | LAHC | CNRS | IOGS | PARISTECH | UDL

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Eric Audouard, Ronan Le Harzic, Nicolas Sanner, Nicolas Huot, C. Donnet, et al.. New methods to control quality and precision of micro-machining with femtosecond lasers. Proceedings SPIE, 2003, 5063, pp.352-355. ⟨ujm-00118364⟩

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