A monolithic optical phase-shift detector on silicon

Philippe Arguel 1 Jérôme Valentin 1 S. Fourment 1 Françoise Lozes-Dupuy 1 Gérard Sarrabayrouse 1 Sophie Bonnefont 1 Y. Jourlin 2 S. Reynaud 2 N. Destouches 2 A. Tishchenko 2 J. Jay 2
1 LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
Abstract : A novel monolithically integrated device used as an optical phase-shift detector is presented. It consists of a diffraction grating etched at the surface of a p-n photodiode fabricated by a process compatible with a standard silicon CMOS technology. When two coherent light beams are collimated toward the surface of the device, the detected optical power generates a current depending on the relative phase between the two incident beams. The operating principle of this detector and the results obtained by finite-difference time-domain modeling are presented. The fabrication process of the first devices is described and the experimental validation of the concept is demonstrated
Document type :
Journal articles
Complete list of metadatas
https://hal-ujm.archives-ouvertes.fr/ujm-00122906
Contributor : Nathalie Destouches <>
Submitted on : Friday, January 5, 2007 - 3:31:39 PM
Last modification on : Friday, June 14, 2019 - 6:30:59 PM

Identifiers

Collections

UNIV-ST-ETIENNE | LAHC | INSA-TOULOUSE | LAAS | IOGS | PARISTECH | INSA-GROUPE | UNIV-TLSE3

Citation

Philippe Arguel, Jérôme Valentin, S. Fourment, Françoise Lozes-Dupuy, Gérard Sarrabayrouse, et al.. A monolithic optical phase-shift detector on silicon. IEEE Sensors Journal, Institute of Electrical and Electronics Engineers, 2005, 5, pp.1305-1309. ⟨10.1109/JSEN.2005.858945⟩. ⟨ujm-00122906⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

157

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD