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Journal articles
A monolithic optical phase-shift detector on silicon
Philippe Arguel
1
Jérôme Valentin
1
S. Fourment
1
Françoise Lozes-Dupuy
1
Gérard Sarrabayrouse
1
Sophie Bonnefont
1
Y. Jourlin
2
S. Reynaud
2
N. Destouches
2
A. Tishchenko
2
J. Jay
2
Philippe Arguel 1
Author Employer institution : Équipe Photonique IdHAL : philippe-arguel
Jérôme Valentin 1
Author
S. Fourment 1
Author
Françoise Lozes-Dupuy 1
Author
Gérard Sarrabayrouse 1
Author
Sophie Bonnefont 1
Author
Y. Jourlin 2
Author
S. Reynaud 2
Author IdHAL : serge-reynaud arXiv : https://arxiv.org/a/reynaud_s_1 ResearcherId : http://www.researcherid.com/rid/J-8061-2014 ORCID : https://orcid.org/0000-0002-1494-696X
1
LAAS - Laboratoire d'analyse et d'architecture des systèmes (7 Av du colonel Roche 31077 TOULOUSE CEDEX 4 - France)
- UT1 - Université Toulouse 1 Capitole (2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9 - France)
- Université Fédérale Toulouse Midi-Pyrénées (41 Allée Jules Guesde, 31000 Toulouse - France)
- INSA Toulouse - Institut National des Sciences Appliquées - Toulouse (135, avenue de Rangueil - 31077 Toulouse cedex 4 - France)
- UT2J - Université Toulouse - Jean Jaurès (5 allées Antonio Machado - 31058 Toulouse Cedex 9 - France)
- UT3 - Université Toulouse III - Paul Sabatier (118 route de Narbonne - 31062 Toulouse - France)
- Université Fédérale Toulouse Midi-Pyrénées (41 Allée Jules Guesde, 31000 Toulouse - France)
- CNRS - Centre National de la Recherche Scientifique : UPR8001 (France)
- Toulouse INP - Institut National Polytechnique (Toulouse) (France)
- Université Fédérale Toulouse Midi-Pyrénées (41 Allée Jules Guesde, 31000 Toulouse - France)
2
LHC - Laboratoire Hubert Curien [Saint Etienne] (18 rue du Professeur Lauras 42000 SAINT-ETIENNE - France)
- IOGS - Institut d'Optique Graduate School (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
- UJM - Université Jean Monnet [Saint-Étienne] (10 rue Tréfilerie - 42100 Saint-Étienne - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5516 (France)
Abstract : A novel monolithically integrated device used as an optical phase-shift detector is presented. It consists of a diffraction grating etched at the surface of a p-n photodiode fabricated by a process compatible with a standard silicon CMOS technology. When two coherent light beams are collimated toward the surface of the device, the detected optical power generates a current depending on the relative phase between the two incident beams. The operating principle of this detector and the results obtained by finite-difference time-domain modeling are presented. The fabrication process of the first devices is described and the experimental validation of the concept is demonstrated
Document type :
Journal articles
Domain :
Complete list of metadata
https://hal-ujm.archives-ouvertes.fr/ujm-00122906
Contributor : Nathalie Destouches <>
Submitted on : Friday, January 5, 2007 - 3:31:39 PM
Last modification on : Thursday, June 10, 2021 - 3:03:58 AM
Contributor : Nathalie Destouches <>
Submitted on : Friday, January 5, 2007 - 3:31:39 PM
Last modification on : Thursday, June 10, 2021 - 3:03:58 AM
Identifiers
- HAL Id : ujm-00122906, version 1
- DOI : 10.1109/JSEN.2005.858945
Collections
UNIV-ST-ETIENNE | LAHC | CNRS | INSA-TOULOUSE | LAAS | IOGS | PARISTECH | INSA-GROUPE | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2 | UDL
Citation
Philippe Arguel, Jérôme Valentin, S. Fourment, Françoise Lozes-Dupuy, Gérard Sarrabayrouse, et al.. A monolithic optical phase-shift detector on silicon. IEEE Sensors Journal, Institute of Electrical and Electronics Engineers, 2005, 5, pp.1305-1309. ⟨10.1109/JSEN.2005.858945⟩. ⟨ujm-00122906⟩
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