Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

Abstract : In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00122925
Contributor : Nathalie Destouches <>
Submitted on : Friday, January 5, 2007 - 4:22:08 PM
Last modification on : Tuesday, August 20, 2019 - 6:14:02 PM

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H. Ottevaere, N. Destouches, C. Gorecki, T. Kossek, S. Pelli, et al.. Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO). Photonics Europe, Apr 2006, Strasbourg, France. pp.618819, ⟨10.1117/12.663888⟩. ⟨ujm-00122925⟩

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