Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

H. Ottevaere 1 N. Destouches 2 C. Gorecki 3 T. Kossek 4 S. Pelli 5 R. Piramidowicz 6 P. Szczepanski 6 M. Kujawinska 7
1 Dept. of Applied Physics and Photonics
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 Département d'Optique
4 Laboratory of Electrical, Electronic and Optoelectronic Metrology
5 IFAC - Institute of Applied Physics "Nello Carrara"
6 Institute of Microelectronics and Optoelectronics
7 Institute of Micromechanics and Photonics
Abstract : In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00122925
Contributor : Nathalie Destouches <>
Submitted on : Friday, January 5, 2007 - 4:22:08 PM
Last modification on : Tuesday, August 20, 2019 - 6:14:02 PM

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UNIV-ST-ETIENNE | LAHC | UNIV-FCOMTE | IOGS | PARISTECH

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H. Ottevaere, N. Destouches, C. Gorecki, T. Kossek, S. Pelli, et al.. Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO). Photonics Europe, Apr 2006, Strasbourg, France. pp.618819, ⟨10.1117/12.663888⟩. ⟨ujm-00122925⟩

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