Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

H. Ottevaere (1) , N. Destouches (2) , C. Gorecki (3) , T. Kossek (4) , S. Pelli (5) , R. Piramidowicz (6) , P. Szczepanski (6) , M. Kujawinska (7)

1 Department of Applied Physics and Photonics
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 Département d'Optique
4 Laboratory of Electrical, Electronic and Optoelectronic Metrology
5 IFAC - Institute of Applied Physics "Nello Carrara"
6 Institute of Microelectronics and Optoelectronics
7 Institute of Micromechanics and Photonics

In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

H. Ottevaere, N. Destouches, C. Gorecki, T. Kossek, S. Pelli, et al.. Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO). Photonics Europe, Apr 2006, Strasbourg, France. pp.618819, ⟨10.1117/12.663888⟩. ⟨ujm-00122925⟩