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Direct ultrafast laser micro-structuring of materials using programmable beam shaping

Nicolas Sanner 1 Nicolas Huot 1 Eric Audouard 1 Christian Larat 2 Jean-Pierre Huignard 2
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 Thales Research and Technology [Palaiseau]
Abstract : Using active and programmable focal-spot shaping, we demonstrate direct femtosecond laser micro-structuring of materials. Surface marking as well as drilling with user-defined geometrical shapes of small dimensions (20 µm) are performed, without moving the laser beam nor the material target.
Keywords : Keywords: femtosecond laser processing laser beam shaping
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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-00136894
Contributor : Nicolas Huot <>
Submitted on : Thursday, March 15, 2007 - 4:24:40 PM
Last modification on : Sunday, February 9, 2020 - 10:08:03 PM

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  • HAL Id : ujm-00136894, version 1

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UNIV-ST-ETIENNE | LAHC | CNRS | IOGS | PARISTECH | UDL

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Nicolas Sanner, Nicolas Huot, Eric Audouard, Christian Larat, Jean-Pierre Huignard. Direct ultrafast laser micro-structuring of materials using programmable beam shaping. Optics and Lasers in Engineering, Elsevier, 2007, 45, pp.737-741. ⟨ujm-00136894⟩

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