Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating

Emilie Gamet (1) , Alexander Tishchenko (1) , Olivier Parriaux (1)

1 LHC - Laboratoire Hubert Curien

A new grating phase mask is designed that allows the cancellation of the zeroth transmitted order in a diffraction configuration where the grating period is smaller than twice the exposure wavelength. An analytical treatment based on the true-mode method delivers the structure parameters, achieving 100% interference contrast. This modal approach is used to describe the modal operation of the giant reflection to zero-order device.

Domaines: Optique [physics.optics]

Emilie Gamet, Alexander Tishchenko, Olivier Parriaux. Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating. Applied optics, 2007, 46 (27), pp.6719-6726. ⟨ujm-00176050⟩