Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

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https://hal-ujm.archives-ouvertes.fr/ujm-00290807
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Submitted on : Thursday, June 26, 2008 - 2:59:11 PM
Last modification on : Tuesday, November 19, 2019 - 2:37:48 AM

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Estelle Neiss, Jean-Luc Rehspringer, Loïc Mager, Alain Fort, Joël Fontaine, et al.. Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching. Applied physics. A, Materials science & processing, Springer Verlag, 2008, A92, pp.351-356. ⟨ujm-00290807⟩

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