Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

Estelle Neiss; Jean-Luc Rehspringer; Loïc Mager; Alain Fort; Joël Fontaine; Paul Montgomery; Manuel Flury; Stéphane Robert

Journal articles

Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

Estelle Neiss ¹ Jean-Luc Rehspringer ² Loïc Mager ² Alain Fort ² Joël Fontaine ¹ Paul Montgomery ³ Manuel Flury ⁴ Stéphane Robert ⁵

1 LSP - Laboratoire des Systèmes Photoniques

2 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg

3 InESS - Institut d'Electronique du Solide et des Systèmes

4 LHC - Laboratoire Hubert Curien [Saint Etienne]

5 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Optics / Photonic

Complete list of metadata

https://hal-ujm.archives-ouvertes.fr/ujm-00290807
Contributor : Manuel Flury Connect in order to contact the contributor
Submitted on : Thursday, June 26, 2008 - 2:59:11 PM
Last modification on : Saturday, June 25, 2022 - 10:49:54 AM

Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

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Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

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