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Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Issam Gereige 1 Stéphane Robert 2 Damien Jamon 2 Jean Jacques Rousseau 1 Gérard Granet 3 
1 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 LASMEA - Laboratoire des sciences et matériaux pour l'électronique et d'automatique
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https://hal-ujm.archives-ouvertes.fr/ujm-00291969
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Monday, June 30, 2008 - 11:02:19 AM
Last modification on : Saturday, June 25, 2022 - 10:49:54 AM

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  • HAL Id : ujm-00291969, version 1

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UNIV-ST-ETIENNE | PRES_CLERMONT | CNRS | UDL

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Issam Gereige, Stéphane Robert, Damien Jamon, Jean Jacques Rousseau, Gérard Granet. Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement. Optics Communications, 2007, 278 (2), pp.270. ⟨ujm-00291969⟩

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