Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Issam Gereige; Stéphane Robert; Damien Jamon; Jean Jacques Rousseau; Gérard Granet

Journal Articles Optics Communications Year : 2007

Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

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Issam Gereige

Function : Author

Dispositifs et Instrumentation en Optoélectronique et micro-ondes

Stéphane Robert

Function : Author
PersonId : 10263
IdHAL : stephane-robert
IdRef : 077187717

Laboratoire Hubert Curien

Damien Jamon

Function : Author
PersonId : 10027
IdHAL : damien-jamon
ORCID : 0000-0001-5218-0793
IdRef : 122878108

Laboratoire Hubert Curien

Jean Jacques Rousseau

Function : Author

Dispositifs et Instrumentation en Optoélectronique et micro-ondes

Gérard Granet

Function : Author
PersonId : 835075

Laboratoire des sciences et matériaux pour l'électronique et d'automatique

Domains

Engineering Sciences [physics] Optics / Photonic

Damien Jamon : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00291969

Submitted on : Monday, June 30, 2008-11:02:19 AM

Last modification on : Friday, March 17, 2023-4:08:04 PM

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ujm-00291969 , version 1 (30-06-2008)

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HAL Id : ujm-00291969 , version 1

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Issam Gereige, Stéphane Robert, Damien Jamon, Jean Jacques Rousseau, Gérard Granet. Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement. Optics Communications, 2007, 278 (2), pp.270. ⟨ujm-00291969⟩

Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

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