Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

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https://hal-ujm.archives-ouvertes.fr/ujm-00291969
Contributor : Damien Jamon <>
Submitted on : Monday, June 30, 2008 - 11:02:19 AM
Last modification on : Tuesday, April 2, 2019 - 1:42:07 AM

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  • HAL Id : ujm-00291969, version 1

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Issam Gereige, Stéphane Robert, Damien Jamon, Jean Jacques Rousseau, Gérard Granet. Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement. Optics Communications, Elsevier, 2007, 278 (2), pp.270. ⟨ujm-00291969⟩

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