Ellipsometric characterization of photo-resist gratings using artificial neural network - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles physica status solidi (c) Year : 2008
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ujm-00292016 , version 1 (30-06-2008)

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  • HAL Id : ujm-00292016 , version 1

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Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Ellipsometric characterization of photo-resist gratings using artificial neural network. physica status solidi (c), 2008, 5 (5), pp.1133. ⟨ujm-00292016⟩
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