Ellipsometric characterization of photo-resist gratings using artificial neural network

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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-00292016
Contributor : Damien Jamon <>
Submitted on : Monday, June 30, 2008 - 11:31:54 AM
Last modification on : Tuesday, April 2, 2019 - 1:41:59 AM

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Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Ellipsometric characterization of photo-resist gratings using artificial neural network. physica status solidi (c), Wiley, 2008, 5 (5), pp.1133. ⟨ujm-00292016⟩

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