Patterned photo-resist control by neural inversion of ellipsometric data

Issam Gereige; Stéphane Robert; M. Stchakovsky; Damien Jamon; Frederic Celle; S. Reynaud; Jean-Claude Pommier; Yves Jourlin

Conference Papers Year : 2007

Patterned photo-resist control by neural inversion of ellipsometric data

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Issam Gereige

Function : Author

Dispositifs et Instrumentation en Optoélectronique et micro-ondes

Stéphane Robert

Function : Author
PersonId : 10263
IdHAL : stephane-robert
IdRef : 077187717

Dispositifs et Instrumentation en Optoélectronique et micro-ondes

M. Stchakovsky

Function : Author

Damien Jamon

Function : Author
PersonId : 10027
IdHAL : damien-jamon
ORCID : 0000-0001-5218-0793
IdRef : 122878108

Dispositifs et Instrumentation en Optoélectronique et micro-ondes

Frederic Celle

Function : Author

Laboratoire Hubert Curien

S. Reynaud

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PersonId : 445
IdHAL : serge-reynaud
ORCID : 0000-0002-1494-696X
IdRef : 075088924

Laboratoire Hubert Curien

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Jean-Claude Pommier

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Laboratoire Hubert Curien

Yves Jourlin

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PersonId : 757915
ORCID : 0000-0002-7935-2150
IdRef : 060278218

Laboratoire Hubert Curien

Damien Jamon : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00292101

Submitted on : Monday, June 30, 2008-2:46:18 PM

Last modification on : Friday, March 24, 2023-2:52:50 PM

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ujm-00292101 , version 1 (30-06-2008)

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HAL Id : ujm-00292101 , version 1

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Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Patterned photo-resist control by neural inversion of ellipsometric data. 4th International Conference on Spectroscopic Ellipsometry, Jun 2007, Stockholm, Sweden. pp.179. ⟨ujm-00292101⟩

Patterned photo-resist control by neural inversion of ellipsometric data

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