Patterned photo-resist control by neural inversion of ellipsometric data

Issam Gereige 1 Stéphane Robert 1 M. Stchakovsky Damien Jamon 1 Frederic Celle 2 S. Reynaud 2 Jean-Claude Pommier 2 Yves Jourlin 2
1 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00292101
Contributor : Damien Jamon <>
Submitted on : Monday, June 30, 2008 - 2:46:18 PM
Last modification on : Tuesday, April 2, 2019 - 1:41:59 AM

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  • HAL Id : ujm-00292101, version 1

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UNIV-ST-ETIENNE | LAHC | PARISTECH | IOGS

Citation

Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Patterned photo-resist control by neural inversion of ellipsometric data. 4th International Conference on Spectroscopic Ellipsometry, Jun 2007, Stockholm, Sweden. pp.179. ⟨ujm-00292101⟩

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