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Université Jean Monnet – Saint-Etienne |  |
Conference papers
Patterned photo-resist control by neural inversion of ellipsometric data
Issam Gereige
1
Stéphane Robert
1
M. Stchakovsky
Damien Jamon
1
Frederic Celle
2
S. Reynaud
2
Jean-Claude Pommier
2
Yves Jourlin
2
Issam Gereige 1
Author
Stéphane Robert 1
Author IdHAL : stephane-robert
M. Stchakovsky
Author
Damien Jamon 1
Author IdHAL : damien-jamon ORCID : https://orcid.org/0000-0001-5218-0793
Frederic Celle 2
Author
S. Reynaud 2
Author IdHAL : serge-reynaud arXiv : https://arxiv.org/a/reynaud_s_1 ResearcherId : http://www.researcherid.com/rid/J-8061-2014 ORCID : https://orcid.org/0000-0002-1494-696X
Jean-Claude Pommier 2
Author
Yves Jourlin 2
Author
1
DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes (France)
- UJM - Université Jean Monnet [Saint-Étienne] : EA3523 (10 rue Tréfilerie - 42100 Saint-Étienne - France)
2
LHC - Laboratoire Hubert Curien [Saint Etienne] (18 rue du Professeur Lauras 42000 SAINT-ETIENNE - France)
- UJM - Université Jean Monnet [Saint-Étienne] (10 rue Tréfilerie - 42100 Saint-Étienne - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5516 (France)
- IOGS - Institut d'Optique Graduate School (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
Document type :
Conference papers
Complete list of metadata
https://hal-ujm.archives-ouvertes.fr/ujm-00292101
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Monday, June 30, 2008 - 2:46:18 PM
Last modification on : Monday, February 22, 2021 - 5:46:04 PM
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Monday, June 30, 2008 - 2:46:18 PM
Last modification on : Monday, February 22, 2021 - 5:46:04 PM
Identifiers
- HAL Id : ujm-00292101, version 1
Citation
Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Patterned photo-resist control by neural inversion of ellipsometric data. 4th International Conference on Spectroscopic Ellipsometry, Jun 2007, Stockholm, Sweden. pp.179. ⟨ujm-00292101⟩
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