Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Document type :
Journal articles
Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00335240
Contributor : Manuel Flury <>
Submitted on : Tuesday, October 28, 2008 - 6:49:43 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

Identifiers

  • HAL Id : ujm-00335240, version 1

Collections

Citation

Estelle Neiss, Manuel Flury, Philippe Gérard, Loïc Mager, Jean-Luc Rehspringer, et al.. Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy. Applied Surface Science, Elsevier, 2007, 254, pp.1986-1992. ⟨ujm-00335240⟩

Share

Metrics

Record views

125