Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Estelle Neiss; Manuel Flury; Philippe Gérard; Loïc Mager; Jean-Luc Rehspringer; Alain Fort; Paul Montgomery; Joël Fontaine; Thierry Engel; Abderrazzaq Benatmane

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Estelle Neiss ¹ Manuel Flury ² Philippe Gérard ¹ Loïc Mager ³ Jean-Luc Rehspringer ³ Alain Fort ³ Paul Montgomery ⁴ Joël Fontaine ¹ Thierry Engel ¹ Abderrazzaq Benatmane ⁴

1 LSP - Laboratoire des Systèmes Photoniques

2 LHC - Laboratoire Hubert Curien [Saint Etienne]

3 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg

4 InESS - Institut d'Electronique du Solide et des Systèmes

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Optics / Photonic

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00335240
Contributor : Manuel Flury <>
Submitted on : Tuesday, October 28, 2008 - 6:49:43 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Identifiers

Collections

Citation

Export

Metrics

125

Contact

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Identifiers

Collections

Citation

Export

Share

Metrics

125

Contact