Skip to Main content Skip to Navigation
Journal articles

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Estelle Neiss 1 Manuel Flury 2 Philippe Gérard 1 Loïc Mager 3 Jean-Luc Rehspringer 3 Alain Fort 3 Paul Montgomery 4 Joël Fontaine 1 Thierry Engel 1 Abderrazzaq Benatmane 4 
1 LSP - Laboratoire des Systèmes Photoniques
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg
4 InESS - Institut d'Electronique du Solide et des Systèmes
Document type :
Journal articles
Complete list of metadata
https://hal-ujm.archives-ouvertes.fr/ujm-00335240
Contributor : Manuel Flury Connect in order to contact the contributor
Submitted on : Tuesday, October 28, 2008 - 6:49:43 PM
Last modification on : Saturday, June 25, 2022 - 10:49:57 AM

Identifiers

  • HAL Id : ujm-00335240, version 1

Collections

UNIV-ST-ETIENNE | CNRS | LAHC | SITE-ALSACE | UDL

Citation

Estelle Neiss, Manuel Flury, Philippe Gérard, Loïc Mager, Jean-Luc Rehspringer, et al.. Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy. Applied Surface Science, Elsevier, 2007, 254, pp.1986-1992. ⟨ujm-00335240⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

29