Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Estelle Neiss 1 Manuel Flury 2 Philippe Gérard 1 Loïc Mager 3 Jean-Luc Rehspringer 3 Alain Fort 3 Paul Montgomery 4 Joël Fontaine 1 Thierry Engel 1 Abderrazzaq Benatmane 4
1 LSP - Laboratoire des Systèmes Photoniques
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg
4 InESS - Institut d'Electronique du Solide et des Systèmes
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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-00335240
Contributor : Manuel Flury <>
Submitted on : Tuesday, October 28, 2008 - 6:49:43 PM
Last modification on : Tuesday, November 19, 2019 - 2:38:48 AM

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  • HAL Id : ujm-00335240, version 1

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UNIV-ST-ETIENNE | CNRS | LAHC | IOGS | PARISTECH

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Estelle Neiss, Manuel Flury, Philippe Gérard, Loïc Mager, Jean-Luc Rehspringer, et al.. Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy. Applied Surface Science, Elsevier, 2007, 254, pp.1986-1992. ⟨ujm-00335240⟩

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