Boron doped diamond-like carbon thin films elaborated by femtosecond pulsed laser ablation for the optimization of the electrical properties in the range 70-300 K

Aurélien Sikora (1) , Alexandre Berkesse , Olivier Bourgeois (2) , Jean-Luc Garden (3) , Christelle Guerret-Piécourt (4) , A.-S. Loir (1) , Florence Garrelie (1) , Christophe Donnet (1)

1 LHC - Laboratoire Hubert Curien
2 NEEL - TPS - Thermodynamique et biophysique des petits systèmes
3 NEEL - ThEMA - Thermique Elaboration Matériaux Applications
4 LTDS - Laboratoire de Tribologie et Dynamique des Systèmes

Domains: Optics / Photonic

Aurélien Sikora, Alexandre Berkesse, Olivier Bourgeois, Jean-Luc Garden, Christelle Guerret-Piécourt, et al.. Boron doped diamond-like carbon thin films elaborated by femtosecond pulsed laser ablation for the optimization of the electrical properties in the range 70-300 K. ITFPC 2007, Innovations on thin Films Processing and Characterization, Nov 2007, Nancy, France. ⟨ujm-00356331⟩