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Conference Papers Year : 2007

Packaging of miniaturized optical encoder


A displacement measurement technology of diffractive interferometry has been developed in the objective of miniaturization. The interference principle has been implemented in the form of a miniature read head prototype according to a novel device configuration. The read head developed at TSI can be miniaturized utilizing 3D hybrid integration and packaging techniques. Integration leads to a very small head comprising a light source (LED or VCSEL), a detector array and needed optical components such as lens, gratings and mirrors. A prototype of hybrid integration read head will be implemented after choosing critical components, such as, the source and detectors and designing the read head in detail.
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Dates and versions

ujm-00358870 , version 1 (04-02-2009)


  • HAL Id : ujm-00358870 , version 1


Y. Jourlin, O. Parriaux, M. Johnson, K. Keränen, J.T. Makinen, et al.. Packaging of miniaturized optical encoder. 16th European Microelectronics and Packaging Conference, June 17-20, 2007, Jun 2007, Oulu,, Finland. pp145-148. ⟨ujm-00358870⟩
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