Packaging of miniaturized optical encoder

Y. Jourlin (1) , O. Parriaux (1) , M. Johnson , K. Keränen (2) , J.T. Makinen (2) , M. Karppinen (2) , P. Karioja (2)

1 LHC - Laboratoire Hubert Curien
2 VTT - VTT Technical Research Centre of Finland

A displacement measurement technology of diffractive interferometry has been developed in the objective of miniaturization. The interference principle has been implemented in the form of a miniature read head prototype according to a novel device configuration. The read head developed at TSI can be miniaturized utilizing 3D hybrid integration and packaging techniques. Integration leads to a very small head comprising a light source (LED or VCSEL), a detector array and needed optical components such as lens, gratings and mirrors. A prototype of hybrid integration read head will be implemented after choosing critical components, such as, the source and detectors and designing the read head in detail.

Mots clés: High resolution optical encoders; optoelectronics packaging

Domaines: Optique [physics.optics]

Y. Jourlin, O. Parriaux, M. Johnson, K. Keränen, J.T. Makinen, et al.. Packaging of miniaturized optical encoder. 16th European Microelectronics and Packaging Conference, June 17-20, 2007, Jun 2007, Oulu,, Finland. pp145-148. ⟨ujm-00358870⟩