Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

Issam Gereige; Stéphane Robert; Sylvie Thiria; Fouad Badran; Gérard Granet; J.J. Rousseau

Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

Issam Gereige ¹ Stéphane Robert ^{1, 2, *} Sylvie Thiria ³ Fouad Badran ^{4, 5} Gérard Granet ⁶ J.J. Rousseau ¹

* Corresponding author

1 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes

2 LHC - Laboratoire Hubert Curien [Saint Etienne]

3 MMSA - Modélisation et Méthodes Statistiques Avancées

LOCEAN - Laboratoire d'Océanographie et du Climat : Expérimentations et Approches Numériques

4 LOCEAN - Laboratoire d'Océanographie et du Climat : Expérimentations et Approches Numériques

5 CEDRIC - Centre d'études et de recherche en informatique et communications

6 LASMEA - Laboratoire des sciences et matériaux pour l'électronique et d'automatique

Abstract : Optical scatterometry has been given much credit during the past few years in the semiconductor industry. The geometry of an optical diffracted structure is deduced from the scattered intensity by solving an inverse problem. This step always requires a previously defined geometrical model. We develop an artificial neural network classifier whose purpose is to identify the structural geometry of a diffraction grating from its measured ellipsometric signature. This will take place before the characterization stage. Two types of geometry will be treated: sinusoidal and symmetric trapezoidal. Experimental results are performed on two manufactured samples: a sinusoidal photoresist grating deposited on a glass substrate and a trapezoidal grating etched on a SiO₂ substrate with periods of 2 m and 0.565 m, respectively.

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Optics / Photonic

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Computer Science [cs] / Neural and Evolutionary Computing [cs.NE]

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00365377
Contributor : Stéphane Robert <>
Submitted on : Tuesday, March 3, 2009 - 12:01:51 PM
Last modification on : Monday, June 17, 2019 - 12:16:03 PM

Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

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Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

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