Optimal architecture of a neural network for a high precision in ellipsometric scatterometry

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https://hal-ujm.archives-ouvertes.fr/ujm-00365392
Contributor : Stéphane Robert <>
Submitted on : Tuesday, March 3, 2009 - 1:16:49 PM
Last modification on : Thursday, March 7, 2019 - 12:14:03 PM

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Issam Gereige, Stéphane Robert, Gérard Granet. Optimal architecture of a neural network for a high precision in ellipsometric scatterometry. Instrumentation, Metrology, and Standards for Nanomanufacturing, Aug 2007, San Diego, United States. pp.66480G-1 - 66480G-11, ⟨10.1117/12.734278⟩. ⟨ujm-00365392⟩

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