Optimal architecture of a neural network for a high precision in ellipsometric scatterometry

Issam Gereige (1) , Stéphane Robert (1) , Gérard Granet (2)

1 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes
2 LASMEA - Laboratoire des sciences et matériaux pour l'électronique et d'automatique

Keywords: Scatterometry; Neural Network; Ellipsometry; Diffraction grating

Domains: Neural and Evolutionary Computing [cs.NE]; Micro and nanotechnologies/Microelectronics

Issam Gereige, Stéphane Robert, Gérard Granet. Optimal architecture of a neural network for a high precision in ellipsometric scatterometry. Instrumentation, Metrology, and Standards for Nanomanufacturing, Aug 2007, San Diego, United States. pp.66480G-1 - 66480G-11, ⟨10.1117/12.734278⟩. ⟨ujm-00365392⟩