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NEMO EPIXNET grating phasemask for 50nm characteristic dimension

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https://hal-ujm.archives-ouvertes.fr/ujm-00372488
Contributor : Yannick Bourgin Connect in order to contact the contributor
Submitted on : Wednesday, April 1, 2009 - 12:07:51 PM
Last modification on : Saturday, June 25, 2022 - 10:50:18 AM

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  • HAL Id : ujm-00372488, version 1

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Yves Jourlin, Yannick Bourgin, Svetlen Tonchev, Colette Veillas, Emilie Gamet, et al.. NEMO EPIXNET grating phasemask for 50nm characteristic dimension. General Scientific Networking Meeting of NEMO, Apr 2009, Santiago de compostela, Spain. ⟨ujm-00372488⟩

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