NEMO EPIXNET grating phasemask for 50nm characteristic dimension

  Yves Jourlin ¹ AuthorId : 176812
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  Yannick Bourgin ¹ AuthorId : 394415

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  Svetlen Tonchev ^{1, 2, 3} AuthorId : 148902
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  Colette Veillas ^{1, 4} AuthorId : 133916
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  Emilie Gamet ¹ AuthorId : 123698
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  Olivier Parriaux ¹ AuthorId : 142181
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  Anne Talneau ⁵ AuthorId : 142081
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  P. Karvinen ⁶ AuthorId : 329615
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  Nicolas Passilly ⁷ AuthorId : 355046
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  A. Md Zain ⁸ AuthorId : 382758
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  R.M. de la Rue ⁸ AuthorId : 382759
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