NEMO EPIXNET grating phasemask for 50nm characteristic dimension

  Yves Jourlin ¹ AuthorId : 176812
Author

  Yannick Bourgin ¹ AuthorId : 394415
Author

  Svetlen Tonchev ^{1, 2, 3} AuthorId : 148902
Author

  Colette Veillas ¹ AuthorId : 133916
Author

  Emilie Gamet ¹ AuthorId : 123698
Author

  Olivier Parriaux ¹ AuthorId : 142181
Author

  Anne Talneau ⁴ AuthorId : 142081
Author IdHAL : anne-talneau

  P. Karvinen ⁵ AuthorId : 329615
Author

  Nicolas Passilly ⁶ AuthorId : 355046
Author IdHAL : nicolas-passilly ORCID : https://orcid.org/0000-0002-4447-4588

  A. Md Zain ⁷ AuthorId : 382758
Author

  R.M. de la Rue ⁷ AuthorId : 382759
Author