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NEMO EPIXNET grating phasemask for 50nm characteristic dimension

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ujm-00372488 , version 1 (01-04-2009)

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  • HAL Id : ujm-00372488 , version 1

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Yves Jourlin, Yannick Bourgin, Svetlen Tonchev, Colette Veillas, Emilie Gamet, et al.. NEMO EPIXNET grating phasemask for 50nm characteristic dimension. General Scientific Networking Meeting of NEMO, Apr 2009, Santiago de compostela, Spain. ⟨ujm-00372488⟩
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