Numerical study of the role of a background gas and system geometry in pulsed laser deposition

Tatiana Itina; A. Katassonov; Wladimir Marine; M. Autric

doi:10.1063/1.367995

Numerical study of the role of a background gas and system geometry in pulsed laser deposition

Tatiana Itina ^{1, 2} A. Katassonov Wladimir Marine M. Autric

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

2 LHC - Laboratoire Hubert Curien [Saint Etienne]

Abstract : The transport of laser ablated particles through a Maxwell-distributed ambient gas is simulated by Monte Carlo method. Three system geometry configurations frequently appearing in laser ablation experiments are considered: plume tilting, use of an interacting gas jet, and deposition on a substrate placed perpendicular to the laser-irradiated surface. The influence of the ambient gas on the formation of film thickness profiles and kinetic energy distributions of the deposited particles is studied. The thermalization of the laser plume and the backscattering of the ablated particles due to collisions with the background gas are investigated from two-dimensional film thickness distributions.

keyword : Laser ablation deposition simulation model

Type de document :

Article dans une revue

Journal of Applied Physics, American Institute of Physics, 1998, 83, pp.6050. 〈10.1063/1.367995〉

Domaine :

Sciences de l'ingénieur [physics] / Génie des procédés

Liste complète des métadonnées

https://hal-ujm.archives-ouvertes.fr/ujm-00378602
Contributeur : Tatiana Itina <>
Soumis le : vendredi 24 avril 2009 - 18:02:47
Dernière modification le : mercredi 25 juillet 2018 - 14:05:31

Numerical study of the role of a background gas and system geometry in pulsed laser deposition

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Numerical study of the role of a background gas and system geometry in pulsed laser deposition

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