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Université Jean Monnet – Saint-Etienne |  |
Conference papers
Photolithography of variable depth gratings on a polymer substrate for the mastering of 3D diffractive optical elements
Abstract : A set of photoresist processes permits the printing of a variable depth sinusoidal profile grating in a positive photoresist layer deposited on a PMMA substrate without degradation of the substrate surface for further moulding tool fabrication with damageless dissolution of the polymer master.
Keywords :
Diffractive optical elements
photolithography
https://hal-ujm.archives-ouvertes.fr/ujm-00381710
Contributor : Yves Jourlin <>
Submitted on : Wednesday, May 6, 2009 - 2:18:08 PM
Last modification on : Monday, January 13, 2020 - 5:46:03 PM
Contributor : Yves Jourlin <>
Submitted on : Wednesday, May 6, 2009 - 2:18:08 PM
Last modification on : Monday, January 13, 2020 - 5:46:03 PM