Miniature holistic displacement sensor by immersion diffractive interferometry

Yves Jourlin (1) , O. Parriaux (1) , J. Fuchs (2)

1 LHC - Laboratoire Hubert Curien
2 IAP - Institut of Applied Physics

High interference contrast is obtained in a miniature dual-grating transmission displacement sensor submitted to an essentially uniform light flood of arbitrary polarization with multifunctional liquid film between gratings.

Keywords: Diffraction gratings; Interferometry; Systems design

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

Yves Jourlin, O. Parriaux, J. Fuchs. Miniature holistic displacement sensor by immersion diffractive interferometry. Optics Express, 2009, 17 (11), pp.9080-9088. ⟨10.1364/OE.17.009080⟩. ⟨ujm-00384981⟩