Slanted boundary conditions in sliced gratings improve the accuracy of the RCWA

I. Gushchin A. V. Tishchenko

Slanted boundary conditions in sliced gratings improve the accuracy of the RCWA

I. Gushchin A. V. Tishchenko ¹

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

Document type :

Conference papers

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00404233
Contributor : Tishchenko Alexandre <>
Submitted on : Wednesday, July 15, 2009 - 5:32:36 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

Slanted boundary conditions in sliced gratings improve the accuracy of the RCWA

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Slanted boundary conditions in sliced gratings improve the accuracy of the RCWA

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