Monolithic double-grating phase mask for high-spatial-coherence large-period grating printing

Yannick Bourgin 1 Sanaa Bakkali 1 Yves Jourlin 1, * Svetlen Tonchev 1, 2 Olivier Parriaux 1
* Auteur correspondant
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 ISSP - Institute of Solid State Physics
Abstract : A monolithic double-grating phase mask comprising three short-pitch grating sections of spatial frequencies k1 and k2 collocated at one side of a substrate produces a large-period interferogram without higher harmonics to print in a photoresist film a latent grating of small spatial frequency equal to twice k2−k1. When incorporated in a write-on-the-fly scheme, the elements permit the fabrication of unlimitedly long gratings.
Keywords : Diffraction gratings Optical fabrication Subwavelength structures
Type de document :
Article dans une revue
Optics Letters, Optical Society of America, 2009, 34 (24), pp.116595
Liste complète des métadonnées
https://hal-ujm.archives-ouvertes.fr/ujm-00437446
Contributeur : Yannick Bourgin <>
Soumis le : lundi 30 novembre 2009 - 15:55:08
Dernière modification le : jeudi 11 janvier 2018 - 06:20:35

Identifiants

  • HAL Id : ujm-00437446, version 1

Collections

UNIV-ST-ETIENNE | LAHC

Citation

Yannick Bourgin, Sanaa Bakkali, Yves Jourlin, Svetlen Tonchev, Olivier Parriaux. Monolithic double-grating phase mask for high-spatial-coherence large-period grating printing. Optics Letters, Optical Society of America, 2009, 34 (24), pp.116595. 〈ujm-00437446〉

Exporter

BibTeX TEI DC DCterms EndNote

Partager

Métriques

Consultations de la notice

119

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD