Three-grating monolithic phase-mask for the single-order writing of large-period gratings

Abstract : A new type of high-efficiency monolithic phase mask comprising three diffraction gratings creates a purely single spatial frequency interferogram of large period that can be used to print large gratings. The fabrication of a long, 2 m-period grating according to the write-on-the-fly scheme is given as an example.
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Communication dans un congrès
EOS Topical Meeting on Diffractive Optics 2010, Feb 2010, Koli, Finland. pp.koli - Bourgin Yannick - 2424, 2010
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https://hal-ujm.archives-ouvertes.fr/ujm-00461081
Contributeur : Yannick Bourgin <>
Soumis le : mercredi 3 mars 2010 - 11:53:32
Dernière modification le : mercredi 25 juillet 2018 - 14:05:31

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  • HAL Id : ujm-00461081, version 1

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Yannick Bourgin, Yves Jourlin, Markku Kuittinen, Olivier Parriaux. Three-grating monolithic phase-mask for the single-order writing of large-period gratings. EOS Topical Meeting on Diffractive Optics 2010, Feb 2010, Koli, Finland. pp.koli - Bourgin Yannick - 2424, 2010. 〈ujm-00461081〉

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