Three-grating monolithic phase-mask for the single-order writing of large-period gratings

Abstract : A new type of high-efficiency monolithic phase mask comprising three diffraction gratings creates a purely single spatial frequency interferogram of large period that can be used to print large gratings. The fabrication of a long, 2 m-period grating according to the write-on-the-fly scheme is given as an example.
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00461081
Contributor : Yannick Bourgin <>
Submitted on : Wednesday, March 3, 2010 - 11:53:32 AM
Last modification on : Tuesday, April 2, 2019 - 1:43:33 AM

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Yannick Bourgin, Yves Jourlin, Markku Kuittinen, Olivier Parriaux. Three-grating monolithic phase-mask for the single-order writing of large-period gratings. EOS Topical Meeting on Diffractive Optics 2010, Feb 2010, Koli, Finland. pp.koli - Bourgin Yannick - 2424. ⟨ujm-00461081⟩

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