Conference Papers
Year : 2009
Yannick Bourgin : Connect in order to contact the contributor
https://hal-ujm.archives-ouvertes.fr/ujm-00477277
Submitted on : Wednesday, April 28, 2010-3:36:04 PM
Last modification on : Friday, March 24, 2023-2:52:53 PM
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- HAL Id : ujm-00477277 , version 1
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Yannick Bourgin, Yves Jourlin, Olivier Parriaux, Svetlen Tonchev, Anne Talneau, et al.. 100 nm period grating writing by high index phase mask immersion lithography. 35th Micro Nano Engineering (MNE), Sep 2009, Gand, Belgium. pp.P-LITH-51. ⟨ujm-00477277⟩
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