Study On Laser-Induced Periodic Structures And Photovoltaic Application

R. Torres (1) , Tatiana Itina (2) , V. Vervich , Mathieu Halbwax (3) , Thibault Jy Derrien (1) , Thierry Sarnet (1) , Marc Sentis (1) , Jorge Ferreira (4) , F. Torregrosa (5)

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques
2 LHC - Laboratoire Hubert Curien
3 IEF - Institut d'électronique fondamentale
4 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
5 IBS

We have irradiated silicon with a series of femtosecond laser pulses to improve light absorption at the silicon surface. The laser treated surface namely black silicon shows excellent optical properties on mono and multicrystalline silicon wafers with a reflectivity reduction down to 3%, without crystal orientation dependence. After the laser process, the front side of samples has been boron-implanted by Plasma Immersion Ion Implantation to create the 3D p+ junction. Improved electrical performances have also been demonstrated with a 57% increase in the photocurrent, compared to non-texturized surface

Domaines: Génie des procédés

R. Torres, Tatiana Itina, V. Vervich, Mathieu Halbwax, Thibault Jy Derrien, et al.. Study On Laser-Induced Periodic Structures And Photovoltaic Application. AIP Conference Proceedings, 2010, 1278, pp.576-581. ⟨10.1063/1.3507149⟩. ⟨ujm-00530665⟩