Integrated microinterferometric sensor for in-plane displacement measurement

J. Krezel 1, * Malgorzata Kujawinska 1 J. Mohr 2 M. Guttmann 2 M. Wissmann 2 S. Tonchev 3 O. Parriaux 3
* Auteur correspondant
1 Warsaw University of Technology [Warsaw]
2 FZK - Forschungszentrum Karlsruhe
3 LHC - Laboratoire Hubert Curien [Saint Etienne]
Abstract : We present an integrated sensor based on a grating interferometer (GI) for in-plane displacement measurement in microregions of large engineering structures. The system concept and design, based on a monolithic version of Czarnek's GI, is discussed in detail. The technology chain of the GI measurement head (MH), including the master fabrication and further replication by means of hot embossing, is described. The numerical analyses of the MH by means of geometric ray tracing and scalar wave propagation are provided. They allow us to determine geometrical tolerance values as well as refractive index homogeneity and nonflatness of MH working surfaces, which provide proper beam guiding. Finally the demonstrative measurement performed with a model of the sensor is presented
Keywords : Instrumentation measurement and metrology :
Type de document :
Article dans une revue
Applied optics, Optical Society of America, 2010, 49 (32), pp.6243-6252. 〈10.1364/AO.49.006243〉
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https://hal-ujm.archives-ouvertes.fr/ujm-00552159
Contributeur : Yves Jourlin <>
Soumis le : mercredi 5 janvier 2011 - 16:02:14
Dernière modification le : mercredi 25 juillet 2018 - 14:05:31

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UNIV-ST-ETIENNE | LAHC | IOGS | PARISTECH

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J. Krezel, Malgorzata Kujawinska, J. Mohr, M. Guttmann, M. Wissmann, et al.. Integrated microinterferometric sensor for in-plane displacement measurement. Applied optics, Optical Society of America, 2010, 49 (32), pp.6243-6252. 〈10.1364/AO.49.006243〉. 〈ujm-00552159〉

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