Integrated microinterferometric sensor for in-plane displacement measurement

J. Krezel 1, * Malgorzata Kujawinska 1 J. Mohr 2 M. Guttmann 2 M. Wissmann 2 S. Tonchev 3 O. Parriaux 3
* Corresponding author
1 Warsaw University of Technology [Warsaw]
2 FZK - Forschungszentrum Karlsruhe
3 LHC - Laboratoire Hubert Curien [Saint Etienne]
Abstract : We present an integrated sensor based on a grating interferometer (GI) for in-plane displacement measurement in microregions of large engineering structures. The system concept and design, based on a monolithic version of Czarnek's GI, is discussed in detail. The technology chain of the GI measurement head (MH), including the master fabrication and further replication by means of hot embossing, is described. The numerical analyses of the MH by means of geometric ray tracing and scalar wave propagation are provided. They allow us to determine geometrical tolerance values as well as refractive index homogeneity and nonflatness of MH working surfaces, which provide proper beam guiding. Finally the demonstrative measurement performed with a model of the sensor is presented
Keywords : Instrumentation measurement and metrology :
Document type :
Journal articles
Complete list of metadatas
https://hal-ujm.archives-ouvertes.fr/ujm-00552159
Contributor : Yves Jourlin <>
Submitted on : Wednesday, January 5, 2011 - 4:02:14 PM
Last modification on : Friday, June 14, 2019 - 8:08:02 PM

Identifiers

Collections

UNIV-ST-ETIENNE | LAHC | IOGS | PARISTECH

Citation

J. Krezel, Malgorzata Kujawinska, J. Mohr, M. Guttmann, M. Wissmann, et al.. Integrated microinterferometric sensor for in-plane displacement measurement. Applied optics, Optical Society of America, 2010, 49 (32), pp.6243-6252. ⟨10.1364/AO.49.006243⟩. ⟨ujm-00552159⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

91

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD