Expanding the applicability domain of phase-mask lithography of gratings to the extreme

Abstract : The applicability domain of phase-masks for the manufacturing of gratings is widely expanded by breaking the limits of a so far very narrow spatial frequency spectral width. This is a result of searching for high index deep-UV film materials and of resorting to a novel phase-mask scheme at the large period side.
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00602526
Contributor : Yannick Bourgin <>
Submitted on : Wednesday, June 22, 2011 - 5:30:48 PM
Last modification on : Friday, September 6, 2019 - 11:14:03 AM

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  • HAL Id : ujm-00602526, version 1

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Yannick Bourgin, Yves Jourlin, Svetlen Tonchev, Ismo Vartiainen, Olivier Parriaux, et al.. Expanding the applicability domain of phase-mask lithography of gratings to the extreme. 2nd EOS Conference on Manufacturing of Optical Components (EOSMOC 2011), May 2011, Munich, Germany. pp.4391. ⟨ujm-00602526⟩

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