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Conference papers

Grating phase-mask lithography for subwavelength radial polarizer fabrication

Abstract : The grating manufacturing technology using a phase-mask is here expanded to the fabrication of circularly symmetrical gratings of radial periodicity with exposure by means of an incident beam of azimuthal polarization. The application example is a radial polarizer for the 442 nm line of an HeCd laser.
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Conference papers
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Contributor : Yves Jourlin Connect in order to contact the contributor
Submitted on : Thursday, July 28, 2011 - 11:50:41 AM
Last modification on : Tuesday, October 19, 2021 - 12:49:44 PM


  • HAL Id : ujm-00612191, version 1



Yves Jourlin, C. Veillas, S. Tonchev, Jean Sauvage-Vincent, U. Zeitner, et al.. Grating phase-mask lithography for subwavelength radial polarizer fabrication. 2nd EOS Conference on Manufacturing of Optical Components (EOSMOC 2011), May 2011, Munich, France. paper 4394. ⟨ujm-00612191⟩



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