Holistic fabrication of stitchingless subwavelength cylindrical gratings by phase-mask coordinate transform
Abstract
A periodic grating with integer number of periods is fabricated at the resist-coated wall of a cylinder by exposing a circularly symmetrical planar high-index phase-mask to a cylindrical wave. This allows a transposition of the spatial coherence features easily achieved in a planar 2D space to the 3D space of cylindrical waves and elements.