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Journal Articles J Mater Sci Year : 2011

New insights in photo-patterned sol-gel-derived TiO2 films

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Abstract

Specific sol-gel formulations and protocols have been adapted to the fine patterning of TiO2 films using a very simplified UVA three-step lithography method. Mechanisms occurring during the photo-patterning procedure and a post-patterning thermal treatment have been studied by Fourier transform infrared spectroscopy, atomic force microscopy, X-ray diffraction, and ellipsometry. Discussions are proposed to support the influence of the photo-patterning procedure and post-patterning treatment on the shape and the dimension of so-formed microstructures. Original additional functionalities arising from such structures are also presented.

Dates and versions

ujm-00612244 , version 1 (28-07-2011)

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S. Briche, Z. Tebby, D. Riassetto, M. Messaoud, E. Gamet, et al.. New insights in photo-patterned sol-gel-derived TiO2 films. J Mater Sci, 2011, 46 (5), pp.1474-1486. ⟨10.1007/s10853-010-4949-7⟩. ⟨ujm-00612244⟩
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