New insights in photo-patterned sol-gel-derived TiO2 films

Abstract : Specific sol-gel formulations and protocols have been adapted to the fine patterning of TiO2 films using a very simplified UVA three-step lithography method. Mechanisms occurring during the photo-patterning procedure and a post-patterning thermal treatment have been studied by Fourier transform infrared spectroscopy, atomic force microscopy, X-ray diffraction, and ellipsometry. Discussions are proposed to support the influence of the photo-patterning procedure and post-patterning treatment on the shape and the dimension of so-formed microstructures. Original additional functionalities arising from such structures are also presented.
Document type :
Journal articles
Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00612244
Contributor : Yves Jourlin <>
Submitted on : Thursday, July 28, 2011 - 2:03:17 PM
Last modification on : Thursday, September 19, 2019 - 9:32:25 AM

Links full text

Identifiers

Citation

S. Briche, Z. Tebby, D. Riassetto, M. Messaoud, E. Gamet, et al.. New insights in photo-patterned sol-gel-derived TiO2 films. J Mater Sci, 2011, 46 (5), pp.1474-1486. ⟨10.1007/s10853-010-4949-7⟩. ⟨ujm-00612244⟩

Share

Metrics

Record views

267