Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing

Abstract : The aim of this study is the elaboration of a high index sol-gel material in order to prepare submicrometric grating. The gratings were obtained after few seconds of UV exposure in one step using an organically modified silica-hafnia matrix. The chemical composition of thin films after UV and annealing treatments were studied using Fourier Transform Infrared Spectroscopy and X-Ray Photoelectron Spectroscopy. The study of optical properties revealed that the annealed films are transparent from 200 to 1000 nm and have a refractive index from 1.550 to 1.701 depending on the hafnium concentration.
Document type :
Journal articles
Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00681960
Contributor : Francis Vocanson <>
Submitted on : Friday, March 23, 2012 - 7:56:07 AM
Last modification on : Thursday, October 17, 2019 - 12:36:13 PM

Identifiers

Citation

Janyce Franc, Vincent Barnier, Francis Vocanson, Émilie Gamet, Marilyne Lesage, et al.. Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing. Thin Solid Films, Elsevier, 2012, 520 (19), pp.6050. ⟨10.1016/j.tsf.2012.03.093⟩. ⟨ujm-00681960⟩

Share

Metrics

Record views

391