Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing

Abstract : The aim of this study is the elaboration of a high index sol-gel material in order to prepare submicrometric grating. The gratings were obtained after few seconds of UV exposure in one step using an organically modified silica-hafnia matrix. The chemical composition of thin films after UV and annealing treatments were studied using Fourier Transform Infrared Spectroscopy and X-Ray Photoelectron Spectroscopy. The study of optical properties revealed that the annealed films are transparent from 200 to 1000 nm and have a refractive index from 1.550 to 1.701 depending on the hafnium concentration.
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Thin Solid Films, Elsevier, 2012, 520 (19), pp.6050. 〈10.1016/j.tsf.2012.03.093〉
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https://hal-ujm.archives-ouvertes.fr/ujm-00681960
Contributeur : Francis Vocanson <>
Soumis le : vendredi 23 mars 2012 - 07:56:07
Dernière modification le : mercredi 25 juillet 2018 - 14:05:31

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Janyce Franc, Vincent Barnier, Francis Vocanson, Émilie Gamet, Marilyne Lesage, et al.. Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing. Thin Solid Films, Elsevier, 2012, 520 (19), pp.6050. 〈10.1016/j.tsf.2012.03.093〉. 〈ujm-00681960〉

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