New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings

V. Gâté (1, 2) , Y. Jourlin (1) , Michel Langlet (2) , Francis Vocanson (1) , Gérard Bernaud (1) , C. Veillas (1) , A. Cazier (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique

Domains: Chemical Sciences; Material chemistry; Physics [physics]; Physics [physics]; Optics [physics.optics]

V. Gâté, Y. Jourlin, Michel Langlet, Francis Vocanson, Gérard Bernaud, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings. SPIE Photonics Europe 2012, Apr 2012, Bruxelles, Belgium. ⟨ujm-00689876⟩