New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

V. Gâté (1, 2) , Y. Jourlin (1) , Michel Langlet (2) , Francis Vocanson (1) , Gérard Bernaud (1) , C. Veillas (1) , A. Cazier (1) , O. Dellea (3)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux

Domaines: Matériaux; Optique [physics.optics]

V. Gâté, Y. Jourlin, Michel Langlet, Francis Vocanson, Gérard Bernaud, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. E-MRS 2012 Spring Meeting symposium V, Laser materials processing for micro and nano applications, May 2012, Strasbourg, France. ⟨ujm-00699339⟩