Holographic exposure of subwavelength circular gratings using a cone based interferogram

Jean Sauvage-Vincent 1 S. Tonchev 1 Yves Jourlin 1 O. Parriaux 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00707404
Contributor : Yves Jourlin <>
Submitted on : Tuesday, June 12, 2012 - 3:52:00 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

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UNIV-ST-ETIENNE | LAHC | IOGS | PARISTECH

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Jean Sauvage-Vincent, S. Tonchev, Yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram. SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280, ⟨10.1117/12.921863⟩. ⟨ujm-00707404⟩

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