Holographic exposure of subwavelength circular gratings using a cone based interferogram

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Submitted on : Tuesday, June 12, 2012 - 3:52:00 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

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Jean Sauvage-Vincent, S. Tonchev, Yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram. SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280, ⟨10.1117/12.921863⟩. ⟨ujm-00707404⟩

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