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Holographic exposure of subwavelength circular gratings using a cone based interferogram

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https://hal-ujm.archives-ouvertes.fr/ujm-00707404
Contributor : Yves Jourlin Connect in order to contact the contributor
Submitted on : Tuesday, June 12, 2012 - 3:52:00 PM
Last modification on : Saturday, June 25, 2022 - 10:53:40 AM

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Jean Sauvage-Vincent, S. Tonchev, yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram. SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280, ⟨10.1117/12.921863⟩. ⟨ujm-00707404⟩

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