Jean Sauvage-Vincent, S. Tonchev, Yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram.
SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280,
⟨10.1117/12.921863⟩.
⟨ujm-00707404⟩