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Conference Papers Year : 2012

Holographic exposure of subwavelength circular gratings using a cone based interferogram

Jean Sauvage-Vincent
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Laboratoire Hubert Curien
S. Tonchev
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Laboratoire Hubert Curien
Yves Jourlin
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Laboratoire Hubert Curien
O. Parriaux
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Laboratoire Hubert Curien

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Physics [physics] Physics [physics] Optics [physics.optics]

Yves Jourlin  : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00707404

Submitted on : Tuesday, June 12, 2012-3:52:00 PM

Last modification on : Friday, March 24, 2023-2:52:55 PM

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ujm-00707404 , version 1 (12-06-2012)

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Jean Sauvage-Vincent, S. Tonchev, Yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram. SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280, ⟨10.1117/12.921863⟩. ⟨ujm-00707404⟩

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