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New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

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https://hal-ujm.archives-ouvertes.fr/ujm-00707708
Contributor : Francis Vocanson <>
Submitted on : Wednesday, June 13, 2012 - 12:20:45 PM
Last modification on : Monday, July 20, 2020 - 10:06:03 AM

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V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Yves Jourlin, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. SPIE, 2012, 8428, pp.84281B. ⟨10.1117/12.921214⟩. ⟨ujm-00707708⟩

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