New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

V. Gâté 1, 2, * Gérard Bernaud 1 C. Veillas 1 A. Cazier 1 Yves Jourlin 1 Michel Langlet 2 Francis Vocanson 1 P. Coudray 3
* Corresponding author
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LMGP - Laboratoire des matériaux et du génie physique
3 KLOE SA - KLOE
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https://hal-ujm.archives-ouvertes.fr/ujm-00707708
Contributor : Francis Vocanson <>
Submitted on : Wednesday, June 13, 2012 - 12:20:45 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

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UNIV-ST-ETIENNE | LAHC | LMGP | UGA | INC-CNRS | IOGS | PARISTECH

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V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Yves Jourlin, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. SPIE, 2012, 8428, pp.84281B. ⟨10.1117/12.921214⟩. ⟨ujm-00707708⟩

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