New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings. - Archive ouverte HAL Access content directly
Journal Articles SPIE Year : 2012

New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

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ujm-00707708 , version 1 (13-06-2012)

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V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Yves Jourlin, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. SPIE, 2012, 8428, pp.84281B. ⟨10.1117/12.921214⟩. ⟨ujm-00707708⟩
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