New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

V. Gâté (1, 2) , Gérard Bernaud (1) , C. Veillas (1) , A. Cazier (1) , Yves Jourlin (1) , Michel Langlet (2) , Francis Vocanson (1) , P. Coudray (3)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 KLOE SA - KLOE

Domains: Material chemistry; Optics [physics.optics]

V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Yves Jourlin, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. SPIE, 2012, 8428, pp.84281B. ⟨10.1117/12.921214⟩. ⟨ujm-00707708⟩