Hydrogenated amorphous silicon microstructuring for 0th order polarization elements at 1.0µm-1.1µm wavelength

Thomas Kampfe 1 S. Tonchev 1 G. Gomard 2 C. Seassal 2 O. Parriaux 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 INL - Photonique - INL - Nanophotonique
INL - Institut des Nanotechnologies de Lyon
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Submitted on : Friday, June 22, 2012 - 8:30:06 AM
Last modification on : Saturday, October 27, 2018 - 1:27:25 AM

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Thomas Kampfe, S. Tonchev, G. Gomard, C. Seassal, O. Parriaux. Hydrogenated amorphous silicon microstructuring for 0th order polarization elements at 1.0µm-1.1µm wavelength. IEEE Photonics Journal, Institute of Electrical and Electronics Engineers (IEEE), 2011, 3 (6), pp.1142 - 1148. ⟨10.1109/JPHOT.2011.2175444⟩. ⟨ujm-00710928⟩

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