Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

S. Tonchev; Thomas Kampfe; O. Parriaux

Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

S. Tonchev ^{1, 2} Thomas Kampfe ¹ O. Parriaux ¹

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 ISSP - Institute for Solid State Physics [Tokyo]

Document type :

Conference papers

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00710933
Contributor : Yves Jourlin <>
Submitted on : Friday, June 22, 2012 - 9:07:34 AM
Last modification on : Saturday, December 1, 2018 - 5:24:02 PM

Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

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Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

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