Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

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https://hal-ujm.archives-ouvertes.fr/ujm-00710933
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Submitted on : Friday, June 22, 2012 - 9:07:34 AM
Last modification on : Saturday, December 1, 2018 - 5:24:02 PM

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S. Tonchev, Thomas Kampfe, O. Parriaux. Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,. 2nd EOS Conference on Manufacturing of Optical Components (EOSMOC), Munich, Germany (2011), May 2011, Germany. ⟨ujm-00710933⟩

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