Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency, - Archive ouverte HAL Access content directly
Conference Papers Year : 2011

Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,

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ujm-00710933 , version 1 (22-06-2012)

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  • HAL Id : ujm-00710933 , version 1

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S. Tonchev, Thomas Kampfe, O. Parriaux. Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,. 2nd EOS Conference on Manufacturing of Optical Components (EOSMOC), Munich, Germany (2011), May 2011, Germany. ⟨ujm-00710933⟩
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