Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

S. Tonchev; O. Parriaux; Thomas Kampfe

Conference Papers Year : 2012

Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

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1

S. Tonchev

Function : Author

Laboratoire Hubert Curien

O. Parriaux

Function : Author

Laboratoire Hubert Curien

Thomas Kampfe

Function : Author
PersonId : 885907

Laboratoire Hubert Curien

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Physics [physics] Physics [physics] Optics [physics.optics]

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https://hal-ujm.archives-ouvertes.fr/ujm-00711014

Submitted on : Friday, June 22, 2012-11:02:03 AM

Last modification on : Friday, March 24, 2023-2:52:55 PM

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ujm-00711014 , version 1 (22-06-2012)

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HAL Id : ujm-00711014 , version 1

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S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩

Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

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