https://hal-ujm.archives-ouvertes.fr/ujm-00711014 Contributor : Yves JourlinConnect in order to contact the contributor Submitted on : Friday, June 22, 2012 - 11:02:03 AM Last modification on : Saturday, June 25, 2022 - 10:53:44 AM
S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩