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Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

S. Tonchev 1 O. Parriaux 1 Thomas Kampfe 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00711014
Contributor : Yves Jourlin <>
Submitted on : Friday, June 22, 2012 - 11:02:03 AM
Last modification on : Monday, January 13, 2020 - 5:46:02 PM

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  • HAL Id : ujm-00711014, version 1

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UNIV-ST-ETIENNE | CNRS | LAHC | IOGS | PARISTECH | UDL

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S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩

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