https://hal-ujm.archives-ouvertes.fr/ujm-00711014
Contributor : Yves Jourlin <>
Submitted on : Friday, June 22, 2012 - 11:02:03 AM Last modification on : Monday, January 13, 2020 - 5:46:02 PM
S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩