Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

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https://hal-ujm.archives-ouvertes.fr/ujm-00711014
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Submitted on : Friday, June 22, 2012 - 11:02:03 AM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

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S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩

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