Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

S. Tonchev; O. Parriaux; Thomas Kampfe

Conference papers

Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

S. Tonchev ¹ O. Parriaux ¹ Thomas Kampfe ¹

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

Document type :

Conference papers

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

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https://hal-ujm.archives-ouvertes.fr/ujm-00711014
Contributor : Yves Jourlin <>
Submitted on : Friday, June 22, 2012 - 11:02:03 AM
Last modification on : Monday, January 13, 2020 - 5:46:02 PM

Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

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Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching

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