Skip to Main content Skip to Navigation
Conference papers

Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

Vanda Godinho 1, 2 Damien Jamon 3 T. C. Rojas 1 J. Garcia-Lopez Arnaud Fernandez 
1 ICMSE - Instituto de Ciencia de Materiales de Sevilla
2 Faculté des Sciences appliquées [Bruxelles]
3 LT2C - Laboratoire Telecom Claude Chappe
Document type :
Conference papers
Complete list of metadata
https://hal-ujm.archives-ouvertes.fr/ujm-00735329
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Tuesday, September 25, 2012 - 3:54:41 PM
Last modification on : Tuesday, October 19, 2021 - 12:55:33 PM

Identifiers

  • HAL Id : ujm-00735329, version 1

Collections

UNIV-ST-ETIENNE | UDL

Citation

Vanda Godinho, Damien Jamon, T. C. Rojas, J. Garcia-Lopez, Arnaud Fernandez. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. E-MRS 2012 SPRING MEETING, May 2012, Strasbourg, France. ⟨ujm-00735329⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

13