Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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https://hal-ujm.archives-ouvertes.fr/ujm-00735329
Contributor : Damien Jamon <>
Submitted on : Tuesday, September 25, 2012 - 3:54:41 PM
Last modification on : Wednesday, December 19, 2018 - 2:12:02 PM

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Vanda Godinho, Damien Jamon, T. C. Rojas, J. Garcia-Lopez, Arnaud Fernandez. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. E-MRS 2012 SPRING MEETING, May 2012, Strasbourg, France. ⟨ujm-00735329⟩

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