Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

Vanda Godinho; Damien Jamon; T. C. Rojas; J. Garcia-Lopez; Arnaud Fernandez

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Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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Vanda Godinho

Function : Author

Instituto de Ciencia de Materiales de Sevilla

Faculté des Sciences appliquées [Bruxelles]

Damien Jamon

Function : Author
PersonId : 10027
IdHAL : damien-jamon
ORCID : 0000-0001-5218-0793
IdRef : 122878108

Laboratoire Telecom Claude Chappe

T. C. Rojas

Function : Author

Instituto de Ciencia de Materiales de Sevilla

J. Garcia-Lopez

Function : Author

Arnaud Fernandez

Function : Author
PersonId : 14225
IdHAL : arnaud-fernandez
ORCID : 0000-0003-3456-7091
IdRef : 139773592

Domains

Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

Damien Jamon : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00735329

Submitted on : Tuesday, September 25, 2012-3:54:41 PM

Last modification on : Friday, March 24, 2023-1:42:08 PM

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ujm-00735329 , version 1 (25-09-2012)

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HAL Id : ujm-00735329 , version 1

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Vanda Godinho, Damien Jamon, T. C. Rojas, J. Garcia-Lopez, Arnaud Fernandez. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. E-MRS 2012 SPRING MEETING, May 2012, Strasbourg, France. ⟨ujm-00735329⟩

Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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