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Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

Vanda Godinho 1, 2 J. Caballero-Hernandez Damien Jamon 3 T. C. Rojas 1 R. Schierholz J. Garcia-Lopez F. J. Ferrer Arnaud Fernandez 
1 ICMSE - Instituto de Ciencia de Materiales de Sevilla
2 Faculté des Sciences appliquées [Bruxelles]
3 LT2C - Laboratoire Telecom Claude Chappe
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00735361
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Tuesday, September 25, 2012 - 4:14:44 PM
Last modification on : Tuesday, October 19, 2021 - 12:55:33 PM

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  • HAL Id : ujm-00735361, version 1

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UNIV-ST-ETIENNE | UDL

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Vanda Godinho, J. Caballero-Hernandez, Damien Jamon, T. C. Rojas, R. Schierholz, et al.. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. European Conference on Nanofilms ECNF 2012, Jun 2012, Ancona, Italy. ⟨ujm-00735361⟩

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