Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

Vanda Godinho; J. Caballero-Hernandez; Damien Jamon; T. C. Rojas; R. Schierholz; J. Garcia-Lopez; F. J. Ferrer; Arnaud Fernandez

Conference papers

Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

Vanda Godinho ^{1, 2} J. Caballero-Hernandez Damien Jamon ³ T. C. Rojas ¹ R. Schierholz J. Garcia-Lopez F. J. Ferrer Arnaud Fernandez

1 ICMSE - Instituto de Ciencia de Materiales de Sevilla

2 Faculté des Sciences appliquées [Bruxelles]

3 LT2C - Laboratoire Telecom Claude Chappe

Document type :

Conference papers

Domain :

Physics [physics] / Condensed Matter [cond-mat] / Materials Science [cond-mat.mtrl-sci]

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-00735361
Contributor : Damien Jamon <>
Submitted on : Tuesday, September 25, 2012 - 4:14:44 PM
Last modification on : Saturday, December 26, 2020 - 1:46:05 PM

Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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