Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties

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Contributor : Damien Jamon <>
Submitted on : Tuesday, September 25, 2012 - 4:14:44 PM
Last modification on : Wednesday, December 19, 2018 - 2:12:02 PM

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Vanda Godinho, J. Caballero-Hernandez, Damien Jamon, T. C. Rojas, R. Schierholz, et al.. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. European Conference on Nanofilms ECNF 2012, Jun 2012, Ancona, Italy. ⟨ujm-00735361⟩

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