Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography - Archive ouverte HAL Access content directly
Journal Articles Optics Letters Year : 2012
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ujm-00749634 , version 1 (07-11-2012)

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  • HAL Id : ujm-00749634 , version 1

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Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Optics Letters, 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩
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