Journal Articles
Optics Letters
Year : 2012
Yves Jourlin : Connect in order to contact the contributor
https://hal-ujm.archives-ouvertes.fr/ujm-00749634
Submitted on : Wednesday, November 7, 2012-10:15:48 PM
Last modification on : Thursday, March 30, 2023-1:30:10 PM
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- HAL Id : ujm-00749634 , version 1
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Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Optics Letters, 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩
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