Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

Fabrice Stehlin; Y. Bourgin; Arnaud Spangenberg; Yves Jourlin; O. Parriaux; Stéphanie Reynaud; Fernand Wieder; Olivier Soppera

Journal Articles Optics Letters Year : 2012

Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

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Fabrice Stehlin

Function : Author

Institut de Science des Matériaux de Mulhouse

Y. Bourgin

Function : Author

Laboratoire Hubert Curien

Arnaud Spangenberg

Function : Author

Institut de Science des Matériaux de Mulhouse

Yves Jourlin

Function : Author
PersonId : 852214

Laboratoire Hubert Curien

O. Parriaux

Function : Author

Laboratoire Hubert Curien

Stéphanie Reynaud

Function : Author

Laboratoire Hubert Curien

Fernand Wieder

Function : Author

Institut de Science des Matériaux de Mulhouse

Olivier Soppera

Function : Author
PersonId : 738946
IdHAL : olivier-soppera
ORCID : 0000-0001-5250-2254
IdRef : 078649781

Institut de Science des Matériaux de Mulhouse

Domains

Physics [physics] Physics [physics] Optics [physics.optics]

Yves Jourlin : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00749634

Submitted on : Wednesday, November 7, 2012-10:15:48 PM

Last modification on : Thursday, March 30, 2023-1:30:10 PM

Dates and versions

ujm-00749634 , version 1 (07-11-2012)

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HAL Id : ujm-00749634 , version 1

Cite

Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Optics Letters, 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩

Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

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