Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

Fabrice Stehlin (1) , Y. Bourgin (2) , Arnaud Spangenberg (1) , Yves Jourlin (2) , O. Parriaux (2) , Stéphanie Reynaud (2) , Fernand Wieder (1) , Olivier Soppera (1)

1 IS2M - Institut de Science des Matériaux de Mulhouse
2 LHC - Laboratoire Hubert Curien

Domaines: Optique [physics.optics]

Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Optics Letters, 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩