Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

Fabrice Stehlin 1 Y. Bourgin 2 Arnaud Spangenberg 1 Yves Jourlin 2 O. Parriaux 2 Stéphanie Reynaud 2 Fernand Wieder 1 Olivier Soppera 1
1 IS2M - Institut de Science des Matériaux de Mulhouse
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-00749634
Contributor : Yves Jourlin <>
Submitted on : Wednesday, November 7, 2012 - 10:15:48 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:31 PM

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  • HAL Id : ujm-00749634, version 1

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Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Opt. Lett., 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩

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