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Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder

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https://hal-ujm.archives-ouvertes.fr/ujm-00749646
Contributor : Yves Jourlin <>
Submitted on : Thursday, November 8, 2012 - 8:15:25 AM
Last modification on : Monday, January 13, 2020 - 5:46:03 PM

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  • HAL Id : ujm-00749646, version 1

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Yves Jourlin, S. Tonchev, C. Veillas, O. Parriaux, J. Laukkanen. Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder. 38th International Conference on Micro and Nano Engineering, Sep 2012, Toulouse, France. ⟨ujm-00749646⟩

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