Frequency characterization of thin soft magnetic material layers used in spiral inductors,

Adoum Kriga (1) , Désiré Allassem (1) , Malloum Soultan (2) , Jean-Pierre Chatelon (1) , A. Siblini (1) , Bruno Allard (3) , Jean-Jacques Rousseau (1)

1 LT2C - Laboratoire Telecom Claude Chappe
2 Université de N'Djaména
3 EE - Ampère, Département Energie Electrique

The paperdetailsthecharacterizationofthinmagneticmaterialslayers,particularlysoftmaterials, with respecttotheirbehaviourinfrequency(from10MHzto1GHz).Theproposedmethodissuitable for anysoftbutinsulatingmagneticmaterial;YttriumIronGarnet(YIG)isusedasanexample.The principleisbasedonacomparisonbetweensimulationsfordifferentvaluesofthepermeabilityand measurementvaluesversusfrequencyofplanarinductorstructures;anexperimentalvalidationis proposedaswell.ThinmagneticmaterialisfirstdepositedonanaluminasubstrateusingRFsputtering technique;aplanarspiralwindingofcopperisthendepositedonthemagneticmaterialbythesame technique.Theeffectivepermeabilityversusfrequencyisobtainedbycomparingtwosamplesofspiral windingswithandwithoutmagneticmaterial.Networkanalysermeasurementsonsamplesofvarious geometricaldimensionsandofdifferentthicknessesarenecessarytodeterminetheeffectivemagnetic permeability;wehaveobtainedarelativeeffectivepermeabilityofabout30forseventurnsspiral inductorofa17 mm YIGfilm.

Mots clés: Thin magneticfilm Electro-magnetic characterization YIG Magnetic component Inductor

Domaines: Micro et nanotechnologies/Microélectronique

Adoum Kriga, Désiré Allassem, Malloum Soultan, Jean-Pierre Chatelon, A. Siblini, et al.. Frequency characterization of thin soft magnetic material layers used in spiral inductors,. Journal of Magnetism and Magnetic Materials, 2012, 324 (14), pp.2227-2232. ⟨10.1016/j.jmmm.2012.02.043⟩. ⟨ujm-00789992⟩