Fast Dynamic Interferometric Lithography for fabricating large sub-micron period diffraction gratings.

V. Gâté (1, 2) , Gérard Bernaud (1) , C. Veillas (1) , A. Cazier (1) , Francis Vocanson (1) , Yves Jourlin (1) , Michel Langlet (2)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique

Domaines: Matériaux; Optique / photonique

V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Francis Vocanson, et al.. Fast Dynamic Interferometric Lithography for fabricating large sub-micron period diffraction gratings.. Optical Engineering, 2013, 52 (9), pp.091712. ⟨ujm-00804789⟩