Fast Dynamic Interferometric Lithography for fabricating large sub-micron period diffraction gratings.

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https://hal-ujm.archives-ouvertes.fr/ujm-00804789
Contributor : Francis Vocanson <>
Submitted on : Tuesday, March 26, 2013 - 12:28:31 PM
Last modification on : Wednesday, July 25, 2018 - 2:05:30 PM

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  • HAL Id : ujm-00804789, version 1

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V. Gâté, Gérard Bernaud, C. Veillas, A. Cazier, Francis Vocanson, et al.. Fast Dynamic Interferometric Lithography for fabricating large sub-micron period diffraction gratings.. Optical Engineering, SPIE, 2013, 52 (9), pp.091712. ⟨ujm-00804789⟩

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