Sub-micrometric patterns written using a DIL method coupled to a TiO2 photo-resist.

  V. Gâté ^{1, 2} AuthorId : 624713

Author

  Yves Jourlin ¹ AuthorId : 384459

Author

  Francis Vocanson ¹ AuthorId : 377539

Author

  O. Dellea ³ AuthorId : 629745
Author

  G. Vercasson ¹ AuthorId : 868018
Author

  S. Reynaud ¹ AuthorId : 1096232

Author IdHAL : serge-reynaud arXiv : https://arxiv.org/a/reynaud_s_1 ResearcherId : http://www.researcherid.com/rid/J-8061-2014 ORCID : https://orcid.org/0000-0002-1494-696X

  D. Riassetto ² AuthorId : 173202
Author

  Michel Langlet ² AuthorId : 868019

Correspondent author IdHAL : michel-langlet VIAF : https://viaf.org/viaf/michel langlet arXiv : https://arxiv.org/a/m langlet