Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams

Manoj Bhuyan (1) , Praveen Kumar Velpula (1) , Jean-Philippe Colombier (1) , Thomas Olivier (1) , Nicolas Faure (1) , Razvan Stoian (1)

1 LHC - Laboratoire Hubert Curien

We report single-shot, high aspect ratio nanovoid fabrication in bulk fused silica using zeroth order chirp-controlled ultrafast laser Bessel beams. We identify a unique laser pulse length and energy dependence of the physical characteristics of machined structures over which nanovoids of diameter in the range 200-400 nm and aspect ratios exceeding 1000 can be fabricated. A mechanism based on the axial energy deposition of nonlinear ultrashort Bessel beams and subsequent material densification or rarefaction in fused silica is proposed, intricating the non-diffractive nature with the diffusing character of laser-generated free carriers. Fluid flow through nanochannel is also demonstrated

Keywords: nanofabrication; Bessel

Domains: Optics / Photonic

Manoj Bhuyan, Praveen Kumar Velpula, Jean-Philippe Colombier, Thomas Olivier, Nicolas Faure, et al.. Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams. Applied Physics Letters, 2014, 104 (2), pp.021107. ⟨10.1063/1.4861899⟩. ⟨ujm-00931776⟩