Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams

Abstract : We report single-shot, high aspect ratio nanovoid fabrication in bulk fused silica using zeroth order chirp-controlled ultrafast laser Bessel beams. We identify a unique laser pulse length and energy dependence of the physical characteristics of machined structures over which nanovoids of diameter in the range 200-400 nm and aspect ratios exceeding 1000 can be fabricated. A mechanism based on the axial energy deposition of nonlinear ultrashort Bessel beams and subsequent material densification or rarefaction in fused silica is proposed, intricating the non-diffractive nature with the diffusing character of laser-generated free carriers. Fluid flow through nanochannel is also demonstrated
Keywords : nanofabrication Bessel
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Article dans une revue
Applied Physics Letters, American Institute of Physics, 2014, 104 (2), pp.021107. 〈10.1063/1.4861899〉
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https://hal-ujm.archives-ouvertes.fr/ujm-00931776
Contributeur : Razvan Stoian <>
Soumis le : mercredi 15 janvier 2014 - 17:16:39
Dernière modification le : mercredi 25 juillet 2018 - 14:05:30

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Manoj Bhuyan, Praveen Kumar Velpula, Jean-Philippe Colombier, Thomas Olivier, Nicolas Faure, et al.. Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams. Applied Physics Letters, American Institute of Physics, 2014, 104 (2), pp.021107. 〈10.1063/1.4861899〉. 〈ujm-00931776〉

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