Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers

Abstract : This paper presents two fabrication techniques of spiral integrated inductors based on magnetic materials. For the first one, the magnetic core is a thin film deposited by RF magnetron sputtering, for the second technique the magnetic core is a thick layer of YIG obtained by micromachining. The addition of the magnetic material is expected to improve the performances of the integrated structure with electromagnetic shield. Low and high frequency equipment are used to characterize the manufactured components. A good correlation is obtained between the results by simulation and measurements for the two manufacturing techniques. These results show that the inductance increases when the thickness of the magnetic layer increases, we can double the inductance value for a thickness sufficiently high.
Type de document :
Article dans une revue
Advanced Electromagnetics, OJS, 2014, 2 (3), pp.44-50. 〈10.7716/aem.v2i3.210〉
Liste complète des métadonnées

https://hal-ujm.archives-ouvertes.fr/ujm-00948270
Contributeur : Jean-Pierre Chatelon <>
Soumis le : mardi 18 février 2014 - 08:49:20
Dernière modification le : vendredi 7 décembre 2018 - 01:48:10

Lien texte intégral

Identifiants

Citation

A. Désiré, A. Kriga, M. Youssouf, A. Siblini, C. M. Jean-Pierre, et al.. Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers. Advanced Electromagnetics, OJS, 2014, 2 (3), pp.44-50. 〈10.7716/aem.v2i3.210〉. 〈ujm-00948270〉

Partager

Métriques

Consultations de la notice

270