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Fabrication of large area periodic TiO2 nanopillars using sol‐gel film and direct microsphere photolithography

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https://hal-ujm.archives-ouvertes.fr/ujm-00990686
Contributor : Francis Vocanson <>
Submitted on : Tuesday, May 13, 2014 - 6:52:49 PM
Last modification on : Thursday, November 19, 2020 - 12:59:53 PM

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  • HAL Id : ujm-00990686, version 1

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Olga Shavdina, Loic Berthod, Yves Jourlin, Francis Vocanson, Michel Langlet, et al.. Fabrication of large area periodic TiO2 nanopillars using sol‐gel film and direct microsphere photolithography. Journées Sol-Gel 2014, May 2014, Tours, France. ⟨ujm-00990686⟩

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