Journal Articles
Microsystem Technologies
Year : 2014
Yves Jourlin : Connect in order to contact the contributor
https://hal-ujm.archives-ouvertes.fr/ujm-01069222
Submitted on : Monday, September 29, 2014-8:46:27 AM
Last modification on : Wednesday, December 28, 2022-3:51:05 AM
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H. Hirshy, S. G. Scholz, Yves Jourlin, S. Tonchev, S. Reynaud, et al.. 2N Period submicron grating at the inner wall of a metal cylinder. Microsystem Technologies, 2014, 20 (10), pp.1432-1858. ⟨10.1007/s00542-013-1949-y⟩. ⟨ujm-01069222⟩
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